Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Matthew C. Gwinn, Luis Fernandez +3 more | 2023-07-04 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Matthew C. Gwinn, Luis Fernandez +3 more | 2023-07-04 |