Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11715620 | Tuning gas cluster ion beam systems | Martin D. Tabat, Kenneth Regan | 2023-08-01 |
| 11694872 | Pattern enhancement using a gas cluster ion beam | Kazuya Dobashi, Hiromitsu Kambara, Masaru Nishino, Reo Kosaka, Luis Fernandez +3 more | 2023-07-04 |
| 11587760 | Wafer scanning apparatus and method for focused beam processing | Paul Consoli, Jerry Negrotti | 2023-02-21 |