TH

Toshiki HINATA

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #224,256 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11761075 Substrate cleaning apparatus Yukimasa Saito, Kazuya Dobashi, Kyoko Ikeda, Shuji Moriya 2023-09-19