SM

Shuji Moriya

TL Tokyo Electron Limited: 1 patents #287 of 865Top 35%
Overall (2023): #255,551 of 537,848Top 50%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11761075 Substrate cleaning apparatus Yukimasa Saito, Toshiki HINATA, Kazuya Dobashi, Kyoko Ikeda 2023-09-19