Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764040 | Placing table and substrate processing apparatus | Shota Kaneko | 2023-09-19 |
| 11742183 | Plasma processing apparatus and control method | Ryuji Hisatomi, Chishio Koshimizu | 2023-08-29 |