SC

Shih-Ming Chang

TSMC: 10 patents #282 of 4,064Top 7%
CU Cubtek: 1 patents #1 of 11Top 10%
Overall (2023): #6,361 of 537,848Top 2%
11
Patents 2023

Issued Patents 2023

Showing 1–11 of 11 patents

Patent #TitleCo-InventorsDate
11854820 Spacer etching process for integrated circuit design Ru-Gun Liu, Cheng-Hsiung Tsai, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee +6 more 2023-12-26
11854807 Line-end extension method and device Chih-Min HSIAO, Chien-Wen Lai, Ru-Gun Liu, Chih-Ming Lai, Yung-Sung Yen +1 more 2023-12-26
11848208 Method for forming semiconductor device structure Chih-Ming Lai, Wei-Liang Lin, Chin-Yuan Tseng, Ru-Gun Liu 2023-12-19
11789370 Optical proximity correction and photomasks Dong-Yo Jheng, Ken-Hsien Hsieh, Chih-Jie Lee, Shuo-Yen Chou, Ru-Gun Liu 2023-10-17
11782352 Lithography process monitoring method Chih-Jie Lee, Shih-Chun Huang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu 2023-10-10
11714951 Geometric mask rule check with favorable and unfavorable zones Shinn-Sheng Yu, Jue-Chin Yu, Ping-Chieh Wu 2023-08-01
11687006 Method of manufacturing photo masks Chien-Cheng Chen, Chia-Jen Chen, Hsin-Chang Lee, Tran-Hui Shen, Yen-Cheng HO +1 more 2023-06-27
11586115 Method of operating semiconductor apparatus Chiu-Hsiang Chen, Ru-Gun Liu 2023-02-21
11572087 Radar monitoring system for traffic control and method thereof Yu-Jen Lin, Guo-Hao Syu 2023-02-07
11556058 Proximity effect correction in electron beam lithography Wen Lo 2023-01-17
11543753 Tunable illuminator for lithography systems Ken-Hsien Hsieh, Wen Lo, Wei-Shuo Su, Hua-Tai Lin 2023-01-03