Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854996 | Method for fabricating semiconductor device | Chiu-Hsiang Chen, Yung-Sung Yen, Ru-Gun Liu | 2023-12-26 |
| 11782352 | Lithography process monitoring method | Chih-Jie Lee, Shih-Ming Chang, Ken-Hsien Hsieh, Yung-Sung Yen, Ru-Gun Liu | 2023-10-10 |
| 11651972 | Method of manufacturing semiconductor devices using directional process | Ya-Wen Yeh, Yu-Tien Shen, Po-Chin Chang, Wei-Liang Lin, Yung-Sung Yen +4 more | 2023-05-16 |
| 11610778 | Self aligned litho etch process patterning method | Chih-Min HSIAO, Chien-Wen Lai, Yung-Sung Yen, Chih-Ming Lai, Ru-Gun Liu | 2023-03-21 |
| 11569090 | Directional deposition for semiconductor fabrication | Ya-Wen Yeh, Chien-Wen Lai, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2023-01-31 |