Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854820 | Spacer etching process for integrated circuit design | Ru-Gun Liu, Cheng-Hsiung Tsai, Chung-Ju Lee, Chih-Ming Lai, Chia-Ying Lee +6 more | 2023-12-26 |
| 11789370 | Optical proximity correction and photomasks | Dong-Yo Jheng, Shih-Ming Chang, Chih-Jie Lee, Shuo-Yen Chou, Ru-Gun Liu | 2023-10-17 |
| 11782352 | Lithography process monitoring method | Chih-Jie Lee, Shih-Chun Huang, Shih-Ming Chang, Yung-Sung Yen, Ru-Gun Liu | 2023-10-10 |
| 11764068 | Method of manufacturing semiconductor devices | Ru-Gun Liu, Chih-Ming Lai, Wei-Liang Lin, Yung-Sung Yen, Chin-Hsiang Lin | 2023-09-19 |
| 11592751 | Method of manufacturing photo masks | Ru-Gun Liu, Wei-Shuo Su | 2023-02-28 |
| 11543753 | Tunable illuminator for lithography systems | Shih-Ming Chang, Wen Lo, Wei-Shuo Su, Hua-Tai Lin | 2023-01-03 |