Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11846881 | EUV photomask | Ching-Huang Chen, Chi-Yuan Sun, Hsin-Chang Lee, Ming-Wei Chen | 2023-12-19 |
| 11804410 | Thin-film non-uniform stress evaluation | Wei-De Ho, Han-Wei Wu, Pei-Sheng TANG, Meng-Jung Lee, Szu-Ping Tung +1 more | 2023-10-31 |
| 11748549 | Method and apparatus for integrated circuit mask patterning | Chin-Min Huang, Bo-Han Chen, Cherng-Shyan Tsay, Chien-Wen Lai, Chia-Cheng Chang +2 more | 2023-09-05 |
| 11749570 | Etch monitoring and performing | Wei-De Ho, Pei-Sheng TANG, Han-Wei Wu, Yuan-Hsiang Lung, Chen-Jung Wang | 2023-09-05 |
| 11688610 | Feature patterning using pitch relaxation and directional end-pushing with ion bombardment | Tzung-Hua Lin, Yi-Ko CHEN, Chia-Chu Liu | 2023-06-27 |
| 11543753 | Tunable illuminator for lithography systems | Ken-Hsien Hsieh, Shih-Ming Chang, Wen Lo, Wei-Shuo Su | 2023-01-03 |