TL

Tzung-Hua Lin

TSMC: 1 patents #2,163 of 4,064Top 55%
Overall (2023): #218,927 of 537,848Top 45%
1
Patents 2023

Issued Patents 2023

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
11688610 Feature patterning using pitch relaxation and directional end-pushing with ion bombardment Yi-Ko CHEN, Chia-Chu Liu, Hua-Tai Lin 2023-06-27