Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688610 | Feature patterning using pitch relaxation and directional end-pushing with ion bombardment | Yi-Ko CHEN, Chia-Chu Liu, Hua-Tai Lin | 2023-06-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11688610 | Feature patterning using pitch relaxation and directional end-pushing with ion bombardment | Yi-Ko CHEN, Chia-Chu Liu, Hua-Tai Lin | 2023-06-27 |