Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11804410 | Thin-film non-uniform stress evaluation | Wei-De Ho, Han-Wei Wu, Meng-Jung Lee, Hua-Tai Lin, Szu-Ping Tung +1 more | 2023-10-31 |
| 11749570 | Etch monitoring and performing | Wei-De Ho, Han-Wei Wu, Yuan-Hsiang Lung, Hua-Tai Lin, Chen-Jung Wang | 2023-09-05 |