Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11556058 | Proximity effect correction in electron beam lithography | Shih-Ming Chang | 2023-01-17 |
| 11543753 | Tunable illuminator for lithography systems | Ken-Hsien Hsieh, Shih-Ming Chang, Wei-Shuo Su, Hua-Tai Lin | 2023-01-03 |