Issued Patents 2023
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11854807 | Line-end extension method and device | Chih-Min HSIAO, Ru-Gun Liu, Chih-Ming Lai, Shih-Ming Chang, Yung-Sung Yen +1 more | 2023-12-26 |
| 11798812 | Landing metal etch process for improved overlay control | Chih-Min HSIAO, Chih-Ming Lai, Ya Hui Chang, Ru-Gun Liu | 2023-10-24 |
| 11748549 | Method and apparatus for integrated circuit mask patterning | Chin-Min Huang, Bo-Han Chen, Cherng-Shyan Tsay, Hua-Tai Lin, Chia-Cheng Chang +2 more | 2023-09-05 |
| 11715638 | Method for forming semiconductor structure | Yu-Chen Chang, Chih-Min HSIAO | 2023-08-01 |
| 11699589 | Method for forming patterned mask layer | Yu-Chen Chang, Chih-Min HSIAO | 2023-07-11 |
| 11610778 | Self aligned litho etch process patterning method | Chih-Min HSIAO, Shih-Chun Huang, Yung-Sung Yen, Chih-Ming Lai, Ru-Gun Liu | 2023-03-21 |
| 11569090 | Directional deposition for semiconductor fabrication | Shih-Chun Huang, Ya-Wen Yeh, Wei-Liang Lin, Ya Hui Chang, Yung-Sung Yen +3 more | 2023-01-31 |