Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11855085 | Semiconductor structure cutting process and structures formed thereby | Chih-Chang Hung, Ming-Ching Chang, Shu-Yuan Ku, Yi-Hsuan Hsiao, I-Wei Yang | 2023-12-26 |
| 11852966 | Lithography mask with a black border regions and method of fabricating the same | Chin-Hsiang Lin, Chien-Cheng Chen, Hsin-Chang Lee, Pei-Cheng Hsu, Yih-Chen Su +2 more | 2023-12-26 |
| 11815804 | EUV mask blank and method of making EUV mask blank | Ping-Hsun Lin, Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Hsin-Chang Lee | 2023-11-14 |
| 11740547 | Method of manufacturing extreme ultraviolet mask with reduced wafer neighboring effect | Wen-Chang Hsueh, Huan-Ling Lee, Hsin-Chang Lee | 2023-08-29 |
| 11698592 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Kuan-Wen Lin, Hsin-Chang Lee | 2023-07-11 |
| 11687006 | Method of manufacturing photo masks | Chien-Cheng Chen, Hsin-Chang Lee, Shih-Ming Chang, Tran-Hui Shen, Yen-Cheng HO +1 more | 2023-06-27 |
| 11652155 | Air spacer and method of forming same | Ming-Jhe Sie, Chen-Huang Huang, Shao-Hua Hsu, Cheng-Chung Chang, Szu-Ping Lee +2 more | 2023-05-16 |
| 11619875 | EUV photo masks and manufacturing method thereof | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2023-04-04 |