Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740547 | Method of manufacturing extreme ultraviolet mask with reduced wafer neighboring effect | Wen-Chang Hsueh, Chia-Jen Chen, Hsin-Chang Lee | 2023-08-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11740547 | Method of manufacturing extreme ultraviolet mask with reduced wafer neighboring effect | Wen-Chang Hsueh, Chia-Jen Chen, Hsin-Chang Lee | 2023-08-29 |