Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815805 | Mask for extreme ultraviolet photolithography | Hsin-Chang Lee, Ta-Cheng Lien | 2023-11-14 |
| 11740547 | Method of manufacturing extreme ultraviolet mask with reduced wafer neighboring effect | Huan-Ling Lee, Chia-Jen Chen, Hsin-Chang Lee | 2023-08-29 |