Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11815804 | EUV mask blank and method of making EUV mask blank | Pei-Cheng Hsu, Ching-Fang Yu, Ta-Cheng Lien, Chia-Jen Chen, Hsin-Chang Lee | 2023-11-14 |
| 11592737 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Hao-Ping Cheng +2 more | 2023-02-28 |