Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11830727 | Forming low-stress silicon nitride layer through hydrogen treatment | Ching-Yu Huang, Hsin-Hao Yeh, Chunyao Wang, Tze-Liang Lee | 2023-11-28 |
| 11652158 | Field-effect transistor device with gate spacer structure | Chunyao Wang | 2023-05-16 |
| 11592737 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Ta-Cheng Lien, Hsin-Chang Lee, Ping-Hsun Lin, Hao-Ping Cheng +2 more | 2023-02-28 |