Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11726399 | EUV photo masks and manufacturing method thereof | Pei-Cheng Hsu, Ching-Huang Chen, Ming-Wei Chen, Ta-Cheng Lien, Hsin-Chang Lee | 2023-08-15 |
| 11592737 | EUV photo masks and manufacturing method thereof | Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Ping-Hsun Lin, Hao-Ping Cheng +2 more | 2023-02-28 |