Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11852969 | Cleaning method for photo masks and apparatus therefor | Hsin-Chang Lee, Pei-Cheng Hsu, Ta-Cheng Lien | 2023-12-26 |
| 11592737 | EUV photo masks and manufacturing method thereof | Hung-Yi Tsai, Wei-Che Hsieh, Ta-Cheng Lien, Hsin-Chang Lee, Ping-Hsun Lin +2 more | 2023-02-28 |