Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11709153 | Acoustic measurement of fabrication equipment clearance | Jun DENG, Sheng-Chi Chin, Yu-Ching Lee | 2023-07-25 |
| 11698592 | Particle removing assembly and method of cleaning mask for lithography | Chen-Yang Lin, Da-Wei Yu, Li-Hsin Wang, Chia-Jen Chen, Hsin-Chang Lee | 2023-07-11 |