Issued Patents 2023
Showing 26–30 of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11602037 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Huan Chen, Yu-Chih Huang, Ming-Hsun Tsai, Heng-Hsin Liu | 2023-03-07 |
| 11576250 | Semiconductor processing tool and methods of operation | Cheng-Hao LAI, Ming-Hsun Tsai, Hsin-Feng Chen, Wei-Shin Cheng, Yu-Kuang SUN +3 more | 2023-02-07 |
| 11567415 | Inspection system for extreme ultraviolet (EUV) light source | Chiao-Hua Cheng, Heng-Hsin Liu, Li-Jui Chen, Sheng-Kang Yu | 2023-01-31 |
| 11556065 | Wafer stage and method thereof | Yu-Huan Chen, Yu-Chih Huang, Ya-An PENG, Li-Jui Chen, Heng-Hsin Liu | 2023-01-17 |
| 11553581 | Radiation source apparatus and method for using the same | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2023-01-10 |