Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742221 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim, Sung Hyun Park +3 more | 2023-08-29 |
| 11721565 | Multi-chamber apparatus | Yong-Jun Choi, Seok Hoon Kim, In-Gi Kim, Sung Hyun Park, Seung Min Shin +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-05-16 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Jihoon Jeong, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2023-03-21 |
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee, Hun Jae Jang +1 more | 2023-02-14 |