Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640115 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Seohyun Kim, Sukhoon Kim, Younghoo Kim, Sangjine Park, Kuntack Lee | 2023-05-02 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2023-03-21 |