Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11700722 | Method for manufacturing a semiconductor device using a support layer to form a gate structure | Jaewha Park, Moonkeun Kim, Dongchan Lim | 2023-07-11 |
| 11640115 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Younghoo Kim, Sangjine Park, Kuntack Lee | 2023-05-02 |