Issued Patents 2023
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798801 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Hunjae JANG, Seungmin Shin, Seungho Kim, Younghoo Kim, Taehong Kim +1 more | 2023-10-24 |
| 11654458 | Substrate-cleaning apparatus having tiltable roll brush | Yonghee Lee, Byoungho Kwon | 2023-05-23 |
| 11646203 | Thin film formation apparatus and method using plasma | Junyeong Lee, Minkyu Park, Insun Yi, Beomseok Kim, Youngseok Kim | 2023-05-09 |
| 11640115 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Sangjine Park | 2023-05-02 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Yong-Jhin Cho, Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh +1 more | 2023-03-21 |
| 11590628 | Rotary body module and chemical mechanical polishing apparatus having the same | Yonghee Lee, Yungjun Kim, Hyunjoon Park, Taemin Earmme, Seungchul Han +1 more | 2023-02-28 |