Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11590628 | Rotary body module and chemical mechanical polishing apparatus having the same | Yonghee Lee, Yungjun Kim, Taemin Earmme, Seungchul Han, Byoungho Kwon +1 more | 2023-02-28 |