Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605551 | Chuck assembly, semiconductor device fabricating apparatus including the same, and method of fabricating semiconductor device | Youngjae Son, Guesuk Lee, Hyeongyun Lee, Seungchul Han | 2023-03-14 |
| 11590628 | Rotary body module and chemical mechanical polishing apparatus having the same | Yonghee Lee, Yungjun Kim, Hyunjoon Park, Seungchul Han, Byoungho Kwon +1 more | 2023-02-28 |