Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11605551 | Chuck assembly, semiconductor device fabricating apparatus including the same, and method of fabricating semiconductor device | Youngjae Son, Taemin Earmme, Hyeongyun Lee, Seungchul Han | 2023-03-14 |