Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11640115 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Kuntack Lee | 2023-05-02 |