Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11798801 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Seungmin Shin, Kuntack Lee, Seungho Kim, Younghoo Kim, Taehong Kim +1 more | 2023-10-24 |