Issued Patents 2023
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742222 | Apparatus for removing a photoresist and apparatus for manufacturing a comiconductor device | Jihun Cheon, Hyun-Jung Lee, Pyojin Jeon, Wonjun Lee | 2023-08-29 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2023-03-21 |
| 11545373 | Apparatus for removing a photoresist and apparatus for manufacturing a semiconductor device | Jihun Cheon, Hyun-Jung Lee, Pyojin Jeon, Wonjun Lee | 2023-01-03 |