Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee, Hun Jae Jang +1 more | 2023-02-14 |