Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721565 | Multi-chamber apparatus | Yong-Jun Choi, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Sung Hyun Park +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim +3 more | 2023-05-16 |
| 11605545 | Wafer cleaning equipment | Hun Jae Jang, Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-03-14 |
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Hun Jae Jang +1 more | 2023-02-14 |