Issued Patents 2023
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742221 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim, Sung Hyun Park +3 more | 2023-08-29 |
| 11735631 | Semiconductor device | Cho-eun Lee, Sang-Gil Lee, Edward Namkyu Cho, Min-Hee Choi, Seung Hun Lee | 2023-08-22 |
| 11728434 | Semiconductor device | Dong Myoung Kim, Dong-Suk Shin, Seung Hun Lee, Cho-eun Lee, Hyun-Jung Lee +3 more | 2023-08-15 |
| 11721565 | Multi-chamber apparatus | Yong-Jun Choi, Young-Hoo Kim, In-Gi Kim, Sung Hyun Park, Seung Min Shin +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-05-16 |
| 11631599 | Semiconductor device manufacturing apparatus including laser module | Ji-Hoon Cha, Jinwoo Lee, In-Gi Kim, Seung Min Shin, Yong-Jun Choi | 2023-04-18 |
| 11605545 | Wafer cleaning equipment | Hun Jae Jang, Seung Min Shin, In-Gi Kim, Tae Hong Kim, Kun-Tack Lee +3 more | 2023-03-14 |
| 11551972 | Integrated circuit devices and method of manufacturing the same | Jin-yeong Joe, Jeong Ho Yoo, Seung Hun Lee, Geun Hee JEONG | 2023-01-10 |