Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11721565 | Multi-chamber apparatus | Yong-Jun Choi, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Sung Hyun Park +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-05-16 |
| 11603584 | Ferritic alloy and method of manufacturing nuclear fuel cladding tube using the same | Sung-Yong Lee, Seung Jae Lee, Yoon Ho Kim, Dae Gyun Ko, Changheui Jang +2 more | 2023-03-14 |
| 11605545 | Wafer cleaning equipment | Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim, Kun-Tack Lee +3 more | 2023-03-14 |
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Tae Min Earmme, Kun-Tack Lee +1 more | 2023-02-14 |