Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791173 | Substrate cleaning equipment, substrate treatment system including the same, and method of fabricating semiconductor device using the substrate cleaning equipment | Seung-Hoon Choi, Ja-Eung Koo, No Ui Kim, Hyun-Kyo Seo, Bo-Un Yoon +1 more | 2023-10-17 |
| 11581182 | Wafer cleaning apparatus, method for cleaning wafer and method for fabricating semiconductor device | Seongkeun Cho, Young-Hoo Kim, Seung Min Shin, Kun-Tack Lee, Hun Jae Jang +1 more | 2023-02-14 |