Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791173 | Substrate cleaning equipment, substrate treatment system including the same, and method of fabricating semiconductor device using the substrate cleaning equipment | Seung-Hoon Choi, No Ui Kim, Hyun-Kyo Seo, Tae Min Earmme, Bo-Un Yoon +1 more | 2023-10-17 |
| 11648644 | Polishing pad conditioning apparatus | Eun-Seok Lee, Kuen-Byul Kim, Jeong Min Na, Chang-Gil Ryu, Hyeon Dong SONG +2 more | 2023-05-16 |