Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11735427 | Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor | Jin Ho Shin, Woo-Mok Son, Nam Hoon Lee, Dong-Eog Kim, Seung-Hun Oh +1 more | 2023-08-22 |
| 11648644 | Polishing pad conditioning apparatus | Ja-Eung Koo, Kuen-Byul Kim, Jeong Min Na, Chang-Gil Ryu, Hyeon Dong SONG +2 more | 2023-05-16 |