Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11764064 | Monitoring device, monitoring method and method of manufacturing semiconductor device using reflectivity of wafer | Ill Hyun Park, Tae Hee Han, Jin Won Ma, Byung Joo Oh, Bong Ju Lee +4 more | 2023-09-19 |
| 11735427 | Polishing apparatus including polishing pad conditioner, non-contact displacement sensor, and data processor | Jin Ho Shin, Woo-Mok Son, Dong-Eog Kim, Seung-Hun Oh, Eun-Seok Lee +1 more | 2023-08-22 |