Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791173 | Substrate cleaning equipment, substrate treatment system including the same, and method of fabricating semiconductor device using the substrate cleaning equipment | Seung-Hoon Choi, Ja-Eung Koo, Hyun-Kyo Seo, Tae Min Earmme, Bo-Un Yoon +1 more | 2023-10-17 |