Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11791173 | Substrate cleaning equipment, substrate treatment system including the same, and method of fabricating semiconductor device using the substrate cleaning equipment | Seung-Hoon Choi, Ja-Eung Koo, No Ui Kim, Hyun-Kyo Seo, Tae Min Earmme +1 more | 2023-10-17 |
| 11581318 | Methods of manufacturing semiconductor devices | Hye-sung Park, Jong Hyuk Park, Jin Woo Bae, Il-young Yoon, Bong Sik Choi | 2023-02-14 |