Issued Patents 2023
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11742221 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-08-29 |
| 11721565 | Multi-chamber apparatus | Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Sung Hyun Park, Seung Min Shin +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim +3 more | 2023-05-16 |
| 11631599 | Semiconductor device manufacturing apparatus including laser module | Ji-Hoon Cha, Jinwoo Lee, Seok Hoon Kim, In-Gi Kim, Seung Min Shin | 2023-04-18 |
| 11605545 | Wafer cleaning equipment | Hun Jae Jang, Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-03-14 |