Issued Patents 2023
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11847776 | System using film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Kiran Shrestha | 2023-12-19 |
| 11838092 | Wireless communication apparatus and method | Kosuke Tanabe, Nader Zein, Christos Masouros | 2023-12-05 |
| 11836913 | Film thickness estimation from machine learning based processing of substrate images | Sivakumar Dhandapani, Arash Alahgholipouromrani, Dominic J. Benvegnu, Kiran Shrestha | 2023-12-05 |
| 11791224 | Technique for training neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2023-10-17 |
| 11780047 | Determination of substrate layer thickness with polishing pad wear compensation | Kun Xu, Benjamin Cherian, Kiran Shrestha | 2023-10-10 |
| 11699595 | Imaging for monitoring thickness in a substrate cleaning system | Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2023-07-11 |
| 11670503 | Method of atomic layer deposition | Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2023-06-06 |
| 11663914 | Geohash-based traffic management | Cheng Luo, Lan Cao, Shiwen He, Ke Zhang, Yuan Yuan Jia | 2023-05-30 |
| 11658078 | Using a trained neural network for use in in-situ monitoring during polishing and polishing system | Kun Xu, Kiran Shrestha, Doyle E. Bennett, David Maxwell Gage, Benjamin Cherian +1 more | 2023-05-23 |
| 11651207 | Training spectrum generation for machine learning system for spectrographic monitoring | Benjamin Cherian, Nicholas A. Wiswell, Thomas H. Osterheld | 2023-05-16 |
| 11646198 | Ultrathin atomic layer deposition film accuracy thickness control | Hu Kang, Adrien LaVoie, Seiji Matsuyama, Purushottam Kumar | 2023-05-09 |
| 11577356 | Machine vision as input to a CMP process control algorithm | Benjamin Cherian, Nicholas A. Wiswell, Dominic J. Benvegnu, Boguslaw A. Swedek, Thomas H. Osterheld | 2023-02-14 |