Issued Patents 2023
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670503 | Method of atomic layer deposition | Jun Qian, Hu Kang, Adrien LaVoie, Purushottam Kumar | 2023-06-06 |
| 11646198 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Hu Kang, Adrien LaVoie, Purushottam Kumar | 2023-05-09 |