Issued Patents 2023
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11670503 | Method of atomic layer deposition | Jun Qian, Hu Kang, Seiji Matsuyama, Purushottam Kumar | 2023-06-06 |
| 11651963 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Pulkit Agarwal, Joseph R. Abel, Purushottam Kumar | 2023-05-16 |
| 11646198 | Ultrathin atomic layer deposition film accuracy thickness control | Jun Qian, Hu Kang, Seiji Matsuyama, Purushottam Kumar | 2023-05-09 |
| 11542599 | Method and apparatus for providing station to station uniformity | Pulkit Agarwal | 2023-01-03 |