Issued Patents 2023
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651963 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Pulkit Agarwal, Purushottam Kumar, Adrien LaVoie | 2023-05-16 |