Issued Patents 2023
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11651963 | Method of improving deposition induced CD imbalance using spatially selective ashing of carbon based film | Ishtak Karim, Joseph R. Abel, Purushottam Kumar, Adrien LaVoie | 2023-05-16 |
| 11542599 | Method and apparatus for providing station to station uniformity | Adrien LaVoie | 2023-01-03 |