Issued Patents 2022
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| D973609 | Upper shield with showerhead for a process chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2022-12-27 |
| D971167 | Lower shield for a substrate processing chamber | Sarath Babu, Ananthkrishna Jupudi, Yueh Sheng Ow, Junqi Wei, Kelvin Boh +1 more | 2022-11-29 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Takatomo Yamaguchi, Shuhei Saido | 2022-06-14 |
| 11289357 | Methods and apparatus for high voltage electrostatic chuck protection | Yueh Sheng Ow, Ananthkrishna Jupudi, Clinton GOH, Kai Liang Liew, Sarath Babu | 2022-03-29 |