Issued Patents 2022
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11495477 | Substrate processing apparatus | Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-11-08 |
| 11384434 | Substrate processing apparatus and heater device | — | 2022-07-12 |
| 11359285 | Substrate processing apparatus, heater and method of manufacturing semiconductor device | Hitoshi Murata, Takashi Yahata, Yuichi Wada, Takatomo Yamaguchi | 2022-06-14 |
| 11261528 | Substrate processing apparatus and method of manufacturing semiconductor device | Hiroaki Hiramatsu, Takuro USHIDA | 2022-03-01 |
| 11222796 | Substrate processing apparatus | Hidenari Yoshida, Takatomo Yamaguchi, Takayuki Nakada, Tomoshi Taniyama | 2022-01-11 |
| 11219096 | Substrate processing apparatus and furnace opening assembly thereof | — | 2022-01-04 |